Assignee
SUMITOMO EATON NOVA
JP·21 granted patents·377 citations·filing 1988–2005
Top patents by PatentIndex Score
21 records- 0191US6573517B1Ion implantation apparatusSUMITOMO EATON NOVA·Filed 2000·Granted Jun 3, 2003·46 cites·14 claims
- 0289US4904902AIon implanting systemSUMITOMO EATON NOVA·Filed 1988·Granted Feb 27, 1990·44 cites·10 claims
- 0385US6794661B2Ion implantation apparatus capable of increasing beam currentSUMITOMO EATON NOVA·Filed 2002·Granted Sep 21, 2004·37 cites·40 claims
- 0485US4914292AIon implanting apparatusSUMITOMO EATON NOVA·Filed 1988·Granted Apr 3, 1990·35 cites·8 claims
- 0584US7138641B2Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation systemSUMITOMO EATON NOVA·Filed 2005·Granted Nov 21, 2006·8 cites·39 claims
- 0679US6803590B2Ion beam mass separation filter, mass separation method thereof and ion source using the sameSUMITOMO EATON NOVA·Filed 2003·Granted Oct 12, 2004·25 cites·33 claims
- 0778US6984833B2Ion implanter and method for controlling the sameSUMITOMO EATON NOVA·Filed 2004·Granted Jan 10, 2006·14 cites·24 claims
- 0877US6797968B2Ion beam processing method and apparatus thereforSUMITOMO EATON NOVA·Filed 2002·Granted Sep 28, 2004·15 cites·72 claims
- 0976US6720563B1Ion implantation apparatus and ion implantation methodSUMITOMO EATON NOVA·Filed 2000·Granted Apr 13, 2004·12 cites·24 claims
- 1072US6753539B2Ion implantation apparatus equipped with plasma shower and ion implantation methodSUMITOMO EATON NOVA·Filed 2003·Granted Jun 22, 2004·9 cites·32 claims
- 1172US6663791B1Detection method of coating film thickness and ion implantation equipment using this methodSUMITOMO EATON NOVA·Filed 2000·Granted Dec 16, 2003·10 cites·6 claims
- 1271US7187143B2Mover device and semiconductor manufacturing apparatus and methodSUMITOMO EATON NOVA·Filed 2004·Granted Mar 6, 2007·16 cites·48 claims
- 1370US7217934B2Wafer scanning deviceSUMITOMO EATON NOVA·Filed 2005·Granted May 15, 2007·8 cites·17 claims
- 1470US6815697B2Ion beam charge neutralizer and method thereforSUMITOMO EATON NOVA·Filed 2003·Granted Nov 9, 2004·8 cites·23 claims
- 1569US6635889B2Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereofSUMITOMO EATON NOVA·Filed 2002·Granted Oct 21, 2003·7 cites·20 claims
- 1667US5046992ARobot arm capable of three-dimensionally moving a robot arm memberSUMITOMO EATON NOVA·Filed 1990·Granted Sep 10, 1991·44 cites·6 claims
- 1759US7012263B2Ion source apparatus and electronic energy optimized method thereforSUMITOMO EATON NOVA·Filed 2004·Granted Mar 14, 2006·4 cites·11 claims
- 1857US6547504B2Wafer carrying system and carrying method thereofSUMITOMO EATON NOVA·Filed 2001·Granted Apr 15, 2003·8 cites·26 claims
- 1951US4994674AIon implantation apparatus capable of avoiding electrification of a substrateSUMITOMO EATON NOVA·Filed 1990·Granted Feb 19, 1991·10 cites·7 claims
- 2039US5931627AWafer transport apparatus that can transfer multiple wafers in a short period of timeSUMITOMO EATON NOVA·Filed 1997·Granted Aug 3, 1999·11 cites·6 claims
- 2136US5030835AIon implantation capable of uniformly injecting an ion beam into a substrateSUMITOMO EATON NOVA·Filed 1989·Granted Jul 9, 1991·6 cites·4 claims
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