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SUMITOMO SITIX CORP
JP36 patents
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US5954873ASep 21, 1999
Manufacturing method for a silicon single crystal wafer
SUMITOMO SITIX CORP151 citations96
US5873468AFeb 23, 1999
Thin-plate supporting container with filter means
SUMITOMO SITIX CORP48 citations94
US5508207AApr 16, 1996
Method of annealing a semiconductor wafer in a hydrogen atmosphere to desorb surface contaminants
SUMITOMO SITIX CORP69 citations94
US6086670AJul 11, 2000
Silicon wafer and method for producing the same
SUMITOMO SITIX CORP19 citations93
US5931662AAug 3, 1999
Silicon single crystal wafer annealing method and equipment and silicon single crystal wafer and manufacturing method related thereto
SUMITOMO SITIX CORP43 citations93
US5932002AAug 3, 1999
Seed crystals for pulling a single crystal and methods using the same
SUMITOMO SITIX CORP22 citations92
US5916364AJun 29, 1999
Method and apparatus for pulling a single crystal
SUMITOMO SITIX CORP26 citations92
US6086671AJul 11, 2000
Method for growing a silicon single crystal
SUMITOMO SITIX CORP23 citations91
US6245430B1Jun 12, 2001
Silicon single crystal wafer and manufacturing method for it
SUMITOMO SITIX CORP28 citations90
US5979474ANov 9, 1999
Cleaning equipment for semiconductor substrates
SUMITOMO SITIX CORP40 citations86
US5772724AJun 30, 1998
High purity titanium production process
SUMITOMO SITIX CORP21 citations86
US5759971AJun 2, 1998
Semiconductor wafer cleaning liquid
SUMITOMO SITIX CORP40 citations86
US6139632AOct 31, 2000
Seed crystals, seed crystal holders, and a method for pulling a single crystal
SUMITOMO SITIX CORP16 citations84
US6110272AAug 29, 2000
Method for producing silicon single crystal
SUMITOMO SITIX CORP25 citations82
US5919306AJul 6, 1999
Silicon melting crucible
SUMITOMO SITIX CORP17 citations79
US6099641AAug 8, 2000
Apparatus for pulling a single crystal
SUMITOMO SITIX CORP14 citations74
US6080238AJun 27, 2000
Single crystal pulling method
SUMITOMO SITIX CORP13 citations74
US5961715AOct 5, 1999
Method for pulling a single crystal
SUMITOMO SITIX CORP12 citations74
US5925147AJul 20, 1999
Process for producing single crystals
SUMITOMO SITIX CORP9 citations74
US5840116ANov 24, 1998
Method of growing crystals
SUMITOMO SITIX CORP10 citations74
US5730799AMar 24, 1998
Device for producing single crystals
SUMITOMO SITIX CORP15 citations74
US6267816B1Jul 31, 2001
Method for single crystal growth
SUMITOMO SITIX CORP9 citations73
US6015461AJan 18, 2000
Seed crystal holders, for pulling a single crystal
SUMITOMO SITIX CORP14 citations73
US6032817AMar 7, 2000
Easily attachable/detachable lid mounted container
SUMITOMO SITIX CORP11 citations72
US5471949ADec 5, 1995
Apparatus for producing silicon single crystal
SUMITOMO SITIX CORP6 citations72
US5683505ANov 4, 1997
Process for producing single crystals
SUMITOMO SITIX CORP8 citations71
US5575847ANov 19, 1996
Apparatus for producing single crystals
SUMITOMO SITIX CORP16 citations71
US6093259AJul 25, 2000
Color development method of metallic titanium and black and colored titanium manufactured by this method
SUMITOMO SITIX CORP10 citations68
USRE35242EMay 21, 1996
Method for growing silicon single crystal
SUMITOMO SITIX CORP6 citations67
US5948160ASep 7, 1999
Method for detecting torsional oscillations and method for manufacturing a single crystal
SUMITOMO SITIX CORP2 citations61
US5477806ADec 26, 1995
Method of producing silison single crystal
SUMITOMO SITIX CORP3 citations61
US5611857AMar 18, 1997
Apparatus for producing single crystals
SUMITOMO SITIX CORP2 citations59
US5474019ADec 12, 1995
Process for producing silicon single crystals
SUMITOMO SITIX CORP2 citations59
US5989341ANov 23, 1999
Single crystal producing apparatus and a single crystal producing method using same
SUMITOMO SITIX CORP2 citations58
US5551978ASep 3, 1996
Apparatus for producing single crystal
SUMITOMO SITIX CORP4 citations57
US5435263AJul 25, 1995
Method of producing single crystal
SUMITOMO SITIX CORP1 citations47