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US3 patents
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US9222842B2Dec 29, 2015
High temperature sensor wafer for in-situ measurements in active plasma
SUN MEI9 citations79
US9134186B2Sep 15, 2015
Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces
SUN MEI2 citations58
US8604361B2Dec 10, 2013
Component package for maintaining safe operating temperature of components
SUN MEI3 citations52