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SUN QINGQING
CN
2 patents
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US9153500B2
Oct 6, 2015
Method for improving the electromigration resistance in the copper interconnection process
SUN QINGQING
7 citations
81
US8455372B2
Jun 4, 2013
Method for cleaning and passivating gallium arsenide surface autologous oxide and depositing AL203 dielectric
SUN QINGQING
0 citations
36