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SUN SAM X
US3 patents
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US8415083B2Apr 9, 2013
On-track process for patterning hardmask by multiple dark field exposures
SUN SAM X6 citations81
US8133659B2Mar 13, 2012
On-track process for patterning hardmask by multiple dark field exposures
SUN SAM X3 citations60
US8168372B2May 1, 2012
Method of creating photolithographic structures with developer-trimmed hard mask
SUN SAM X2 citations56