Assignee
SUPERION LTD
GB·5 granted patents·116 citations·filing 1990–2000
Top patents by PatentIndex Score
5 records- 0190US6498348B2Apparatus and method relating to charged particlesSUPERION LTD·Filed 2000·Granted Dec 24, 2002·40 cites·43 claims
- 0271US5300785AApparatus for and method of producing ion beamsSUPERION LTD·Filed 1991·Granted Apr 5, 1994·23 cites·21 claims
- 0370US5099130AApparatus and methods relating to scanning ion beamsSUPERION LTD·Filed 1991·Granted Mar 24, 1992·21 cites·18 claims
- 0462US5194748AMethod and apparatus relating to ion implantationSUPERION LTD·Filed 1990·Granted Mar 16, 1993·15 cites·18 claims
- 0546US5124557AApparatus and methods relating to ion implantation and heat transferSUPERION LTD·Filed 1990·Granted Jun 23, 1992·17 cites·26 claims
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