Assignee

SWAMINATHAN SHANKAR

US2 patents

Top patents by PatentIndex Score

US8956983B2Feb 17, 2015

Conformal doping via plasma activated atomic layer deposition and conformal film deposition

SWAMINATHAN SHANKAR588 citations98

US8637411B2Jan 28, 2014

Plasma activated conformal dielectric film deposition

SWAMINATHAN SHANKAR99 citations97