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SWISSLITHO AG

CH2 patents

Top patents by PatentIndex Score

US9921486B2Mar 20, 2018

Multiscale patterning of a sample with apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capability

SWISSLITHO AG0 citations43

US10209630B2Feb 19, 2019

Scanning probe nanolithography system and method

SWISSLITHO AG0 citations26