Assignee
TABARELLI WERNER
LI9 patents
Top patents by PatentIndex Score
US4509852AApr 9, 1985
Apparatus for the photolithographic manufacture of integrated circuit elements
TABARELLI WERNER1,584 citations97
US4346164AAug 24, 1982
Photolithographic method for the manufacture of integrated circuits
TABARELLI WERNER1,769 citations97
US5146284ASep 8, 1992
Interferometer gas flow system
TABARELLI WERNER43 citations90
US5260762ANov 9, 1993
Device for non-contact measurement of speed, displacement travel and/or distance
TABARELLI WERNER23 citations86
US5359415AOct 25, 1994
Interferometer for determining the position of displacement travel of a movable measuring mirror or the like
TABARELLI WERNER14 citations72
US5329356AJul 12, 1994
Interferometer head and interferometer arrangement with rigid support structure
TABARELLI WERNER15 citations71
US5177566AJan 5, 1993
Interferometer with environment sensitive static etalon
TABARELLI WERNER15 citations69
US5124994AJun 23, 1992
Light generating device
TABARELLI WERNER11 citations69
US5645335AJul 8, 1997
Device for converting the pictures displayed on a luminous surface into electrical signals
TABARELLI WERNER5 citations50