Assignee
TABAT MARTIN D
US·6 granted patents·38 citations·filing 2008–2011
Top patents by PatentIndex Score
6 records- 0190US8097860B2Multiple nozzle gas cluster ion beam processing system and method of operatingTABAT MARTIN D·Filed 2010·Granted Jan 17, 2012·13 cites·20 claims
- 0285US8455060B2Method for depositing hydrogenated diamond-like carbon films using a gas cluster ion beamTABAT MARTIN D·Filed 2009·Granted Jun 4, 2013·6 cites·20 claims
- 0383US8202435B2Method for selectively etching areas of a substrate using a gas cluster ion beamTABAT MARTIN D·Filed 2008·Granted Jun 19, 2012·9 cites·23 claims
- 0482US8512586B2Gas cluster ion beam etching process for achieving target etch process metrics for multiple materialsTABAT MARTIN D·Filed 2011·Granted Aug 20, 2013·5 cites·20 claims
- 0575US8304033B2Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzlesTABAT MARTIN D·Filed 2009·Granted Nov 6, 2012·3 cites·45 claims
- 0671US8981322B2Multiple nozzle gas cluster ion beam systemTABAT MARTIN D·Filed 2009·Granted Mar 17, 2015·2 cites·58 claims
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