Assignee
TACHIBANA HIROYUKI
JP·3 granted patents·17 citations·filing 2007–2010
Top patents by PatentIndex Score
3 records- 0185US8607733B2Atomic layer deposition apparatus and atomic layer deposition methodTACHIBANA HIROYUKI·Filed 2009·Granted Dec 17, 2013·11 cites·12 claims
- 0280US8202367B2Atomic layer growing apparatusTACHIBANA HIROYUKI·Filed 2007·Granted Jun 19, 2012·6 cites·4 claims
- 0341US9194043B2Atomic layer deposition apparatusTACHIBANA HIROYUKI·Filed 2010·Granted Nov 24, 2015·0 cites·4 claims
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