Assignee
TADOKORO MASAHIDE
JP4 patents
Top patents by PatentIndex Score
US8927906B2Jan 6, 2015
Heating device, coating/developing system, heating method, coating/developing method, and recording medium having program for executing heating method or coating/developing method
TADOKORO MASAHIDE469 citations98
US8242417B2Aug 14, 2012
Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate
TADOKORO MASAHIDE6 citations82
US8698052B2Apr 15, 2014
Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate
TADOKORO MASAHIDE2 citations60
US8308381B2Nov 13, 2012
Substrate processing method, computer-readable storage medium, and substrate processing system
TADOKORO MASAHIDE0 citations51