Assignee
TAHARA SHIGERU
JP·4 granted patents·2 pending applications·11 citations·filing 2007–2012
Top patents by PatentIndex Score
6 records- 0186US8492287B2Substrate processing methodTAHARA SHIGERU·Filed 2011·Granted Jul 23, 2013·7 cites·13 claims
- 0273US9126229B2Deposit removal methodTAHARA SHIGERU·Filed 2012·Granted Sep 8, 2015·3 cites·8 claims
- 0362US9177781B2Plasma processing method and manufacturing method of semiconductor deviceTAHARA SHIGERU·Filed 2011·Granted Nov 3, 2015·1 cites·8 claims
- 0451US2008045030A1Substrate processing method, substrate processing system and storage mediumTAHARA SHIGERU·Filed 2007·Application pending·0 cites
- 0547US8404596B2Plasma ashing methodTAHARA SHIGERU·Filed 2011·Granted Mar 26, 2013·0 cites·29 claims
- 0639US2012270406A1Cleaning method of plasma processing apparatus and plasma processing methodTAHARA SHIGERU·Filed 2012·Application pending·0 cites
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