Assignee
TAKABA HIROYUKI
JP·3 granted patents·43 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0192US8399366B1Method of depositing highly conformal amorphous carbon films over raised featuresTAKABA HIROYUKI·Filed 2011·Granted Mar 19, 2013·40 cites·19 claims
- 0265US8778810B2Plasma treatment methodTAKABA HIROYUKI·Filed 2010·Granted Jul 15, 2014·2 cites·24 claims
- 0360US8962454B2Method of depositing dielectric films using microwave plasmaTAKABA HIROYUKI·Filed 2011·Granted Feb 24, 2015·1 cites·14 claims
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