Assignee
TALLAVARJULA SAIRAJU
US·2 granted patents·16 citations·filing 2008–2011
Top patents by PatentIndex Score
2 records- 0188US8101906B2Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambersTALLAVARJULA SAIRAJU·Filed 2008·Granted Jan 24, 2012·14 cites·11 claims
- 0271US9865438B2Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambersTALLAVARJULA SAIRAJU·Filed 2011·Granted Jan 9, 2018·2 cites·8 claims
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