Assignee
TAMURA AKITAKE
JP·2 granted patents·2 pending applications·7 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0175US8950999B2Substrate processing apparatus and particle adhesion preventing methodTAMURA AKITAKE·Filed 2008·Granted Feb 10, 2015·5 cites·15 claims
- 0264US8673086B2Method and device for cleaning a substrate and storage mediumTAMURA AKITAKE·Filed 2009·Granted Mar 18, 2014·2 cites·10 claims
- 0357US2011244693A1Component for semiconductor processing apparatus and manufacturing method thereofTAMURA AKITAKE·Filed 2011·Application pending·0 cites
- 0434US2012255193A1Substrate drying apparatus and methodTAMURA AKITAKE·Filed 2010·Application pending·0 cites
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