Assignee
TAN SIA KIM
SG·2 granted patents·3 citations·filing 2009–2010
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0172US8057968B2Mask and method to pattern chromeless phase lithography contact holeTAN SIA KIM·Filed 2010·Granted Nov 15, 2011·2 cites·25 claims
- 0254US8413083B2Mask system employing substantially circular optical proximity correction target and method of manufacture thereofTAN SIA KIM·Filed 2009·Granted Apr 2, 2013·1 cites·20 claims
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