Assignee
TANAKA MAKI
JP·2 granted patents·1 pending application·8 citations·filing 2008–2010
Top patents by PatentIndex Score
3 records- 0175US8671366B2Estimating shape based on comparison between actual waveform and library in lithography processTANAKA MAKI·Filed 2010·Granted Mar 11, 2014·4 cites·4 claims
- 0275US8214166B2Method and its system for calibrating measured data between different measuring toolsTANAKA MAKI·Filed 2008·Granted Jul 3, 2012·4 cites·21 claims
- 0336US2012126116A1Pattern shape selection method and pattern measuring deviceTANAKA MAKI·Filed 2010·Application pending·0 cites
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