Assignee
TANG SHOUHONG
US·3 granted patents·1 pending application·22 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0183US8068234B2Method and apparatus for measuring shape or thickness information of a substrateTANG SHOUHONG·Filed 2009·Granted Nov 29, 2011·15 cites·58 claims
- 0282US8537369B1Method and apparatus for measuring the shape and thickness variation of a wafer by two single-shot phase-shifting interferometersTANG SHOUHONG·Filed 2010·Granted Sep 17, 2013·7 cites·17 claims
- 0341US9019491B2Method and apparatus for measuring shape and thickness variation of a waferTANG SHOUHONG·Filed 2012·Granted Apr 28, 2015·0 cites·23 claims
- 0435US2015176973A1A dual interferometer system with a short reference flat distance for wafer shape and thickness variation measurementTANG SHOUHONG·Filed 2011·Application pending·0 cites
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