Assignee
TANITSU OSAMU
JP·12 granted patents·2 pending applications·43 citations·filing 2008–2012
Top patents by PatentIndex Score
14 records- 0196US8456624B2Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing methodTANITSU OSAMU·Filed 2010·Granted Jun 4, 2013·14 cites·29 claims
- 0295US9140990B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2011·Granted Sep 22, 2015·8 cites·9 claims
- 0393US8446579B2Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing methodTANITSU OSAMU·Filed 2012·Granted May 21, 2013·7 cites·18 claims
- 0487US8913227B2Illumination optical system, aligner, and process for fabricating deviceTANITSU OSAMU·Filed 2011·Granted Dec 16, 2014·5 cites·28 claims
- 0576US9429848B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2008·Granted Aug 30, 2016·6 cites·17 claims
- 0665US9116346B2Illumination apparatus, illumination method, exposure apparatus, and device manufacturing methodTANITSU OSAMU·Filed 2008·Granted Aug 25, 2015·1 cites·32 claims
- 0765US8451427B2Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing methodTANITSU OSAMU·Filed 2008·Granted May 28, 2013·1 cites·13 claims
- 0863US10007194B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2008·Granted Jun 26, 2018·1 cites·7 claims
- 0958US9341956B2Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing methodTANITSU OSAMU·Filed 2012·Granted May 17, 2016·0 cites·24 claims
- 1058US2012236285A1Illumination optical system, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2012·Application pending·0 cites
- 1157US2009002664A1Optical integrator, illumination optical device, aligner, and method for fabricating deviceTANITSU OSAMU·Filed 2008·Application pending·0 cites
- 1255US9057877B2Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing methodTANITSU OSAMU·Filed 2012·Granted Jun 16, 2015·0 cites·5 claims
- 1354US9599905B2Illumination optical system, exposure apparatus, device production method, and light polarization unitTANITSU OSAMU·Filed 2011·Granted Mar 21, 2017·0 cites·23 claims
- 1454US8611013B2Optical integrator, illumination optical device, aligner, and method for fabricating deviceTANITSU OSAMU·Filed 2010·Granted Dec 17, 2013·0 cites·31 claims
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