Assignee
TATEISHI FUMINORI
JP·4 granted patents·1 pending application·16 citations·filing 2010–2012
Top patents by PatentIndex Score
5 records- 0190US8058145B2Micro-electro-mechanical device and manufacturing method for the sameTATEISHI FUMINORI·Filed 2010·Granted Nov 15, 2011·11 cites·33 claims
- 0287US8552473B2Micro-electro-mechanical device and manufacturing method for the sameTATEISHI FUMINORI·Filed 2011·Granted Oct 8, 2013·5 cites·28 claims
- 0354US8722135B2Method for discharging chemical solutionTATEISHI FUMINORI·Filed 2010·Granted May 13, 2014·0 cites·18 claims
- 0451US8093088B2Manufacturing method of micro-electro-mechanical deviceTATEISHI FUMINORI·Filed 2010·Granted Jan 10, 2012·0 cites·14 claims
- 0550US2012202324A1Manufacturing apparatus of semiconductor device and pattern-forming methodTATEISHI FUMINORI·Filed 2012·Application pending·0 cites
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