Assignee
TAVASSOLI HAMID
US·3 granted patents·1 pending application·11 citations·filing 2011–2014
Top patents by PatentIndex Score
4 records- 0182US8822876B2Multi-zoned plasma processing electrostatic chuck with improved temperature uniformityTAVASSOLI HAMID·Filed 2011·Granted Sep 2, 2014·5 cites·20 claims
- 0279US8629370B2Assembly for delivering RF power and DC voltage to a plasma processing chamberTAVASSOLI HAMID·Filed 2011·Granted Jan 14, 2014·5 cites·20 claims
- 0365US9248509B2Multi-zoned plasma processing electrostatic chuck with improved temperature uniformityTAVASSOLI HAMID·Filed 2014·Granted Feb 2, 2016·1 cites·16 claims
- 0439US2013284372A1Esc cooling base for large diameter subsratesTAVASSOLI HAMID·Filed 2013·Application pending·0 cites
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