Assignee
TAWARAYAMA KAZUO
JP·1 granted patent·2 pending applications·0 citations·filing 2008–2011
Top patents by PatentIndex Score
3 records- 0139US2009141378A1Optical element and optical apparatusTAWARAYAMA KAZUO·Filed 2008·Application pending·0 cites
- 0230US8067757B2Extreme ultraviolet light source apparatus and method of adjusting the sameTAWARAYAMA KAZUO·Filed 2010·Granted Nov 29, 2011·0 cites·14 claims
- 0327US2011285975A1Method of managing euv exposure mask and exposure methodTAWARAYAMA KAZUO·Filed 2011·Application pending·0 cites
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