Assignee
TEGAL CORP
95 patents
Top patents by PatentIndex Score
US7713592B2May 11, 2010
Nanolayer deposition process
TEGAL CORP116 citations99
US7425224B2Sep 16, 2008
High pressure chemical vapor trapping method
TEGAL CORP379 citations99
US7163721B2Jan 16, 2007
Method to plasma deposit on organic polymer dielectric film
TEGAL CORP531 citations99
US7153542B2Dec 26, 2006
Assembly line processing method
TEGAL CORP650 citations99
US6756318B2Jun 29, 2004
Nanolayer thick film processing system and method
TEGAL CORP650 citations99
US4464223AAug 7, 1984
Plasma reactor apparatus and method
TEGAL CORP275 citations98
US4590042AMay 20, 1986
Plasma reactor having slotted manifold
TEGAL CORP346 citations97
US4209357AJun 24, 1980
Plasma reactor apparatus
TEGAL CORP415 citations97
US7235484B2Jun 26, 2007
Nanolayer thick film processing system and method
TEGAL CORP55 citations96
US4790258ADec 13, 1988
Magnetically coupled wafer lift pins
TEGAL CORP420 citations96
US4780169AOct 25, 1988
Non-uniform gas inlet for dry etching apparatus
TEGAL CORP625 citations96
US6354240B1Mar 12, 2002
Plasma etch reactor having a plurality of magnets
TEGAL CORP57 citations95
US6190496B1Feb 20, 2001
Plasma etch reactor and method for emerging films
TEGAL CORP68 citations95
US6048435AApr 11, 2000
Plasma etch reactor and method for emerging films
TEGAL CORP58 citations95
US6006694ADec 28, 1999
Plasma reactor with a deposition shield
TEGAL CORP60 citations95
US4793975ADec 27, 1988
Plasma Reactor with removable insert
TEGAL CORP95 citations95
US4724510AFeb 9, 1988
Electrostatic wafer clamp
TEGAL CORP89 citations95
US4632624ADec 30, 1986
Vacuum load lock apparatus
TEGAL CORP64 citations95
US4624728ANov 25, 1986
Pin lift plasma processing
TEGAL CORP361 citations95
US4579618AApr 1, 1986
Plasma reactor apparatus
TEGAL CORP543 citations95
US4786359ANov 22, 1988
Xenon enhanced plasma etch
TEGAL CORP87 citations94
US4585516AApr 29, 1986
Variable duty cycle, multiple frequency, plasma reactor
TEGAL CORP212 citations94
US7361387B2Apr 22, 2008
Plasma enhanced pulsed layer deposition
TEGAL CORP17 citations93
US4585920AApr 29, 1986
Plasma reactor removable insert
TEGAL CORP289 citations93
US4321232AMar 23, 1982
Package and sterilizing process for same
TEGAL CORP78 citations93
US7442615B2Oct 28, 2008
Semiconductor processing system and method
TEGAL CORP18 citations92
US6620335B1Sep 16, 2003
Plasma etch reactor and method
TEGAL CORP23 citations92
US6410448B1Jun 25, 2002
Plasma etch reactor and method for emerging films
TEGAL CORP15 citations92
US6391148B2May 21, 2002
Cobalt silicide etch process and apparatus
TEGAL CORP21 citations92
US6346428B1Feb 12, 2002
Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing
TEGAL CORP17 citations92
US6287975B1Sep 11, 2001
Method for using a hard mask for critical dimension growth containment
TEGAL CORP21 citations92
US4727993AMar 1, 1988
Wafer cassette having multi-directional access
TEGAL CORP37 citations92
US4614639ASep 30, 1986
Compound flow plasma reactor
TEGAL CORP29 citations92
US4575714AMar 11, 1986
Module presence sensor
TEGAL CORP55 citations92
US4357195ANov 2, 1982
Apparatus for controlling a plasma reaction
TEGAL CORP36 citations92
US6127277AOct 3, 2000
Method and apparatus for etching a semiconductor wafer with features having vertical sidewalls
TEGAL CORP21 citations91
US4861222AAug 29, 1989
Cassette elevator for use in a modular article processing machine
TEGAL CORP45 citations91
US4801241AJan 31, 1989
Modular article processing machine and method of article handling therein
TEGAL CORP42 citations91
US4697089ASep 29, 1987
Dual wavelength sensor which employs object as part of a corner reflector
TEGAL CORP26 citations91
US4611919ASep 16, 1986
Process monitor and method thereof
TEGAL CORP83 citations90
US4547247AOct 15, 1985
Plasma reactor chuck assembly
TEGAL CORP44 citations89
US7645618B2Jan 12, 2010
Dry etch stop process for eliminating electrical shorting in MRAM device structures
TEGAL CORP19 citations88
US4949670AAug 21, 1990
Method and apparatus for low pressure plasma
TEGAL CORP30 citations88
US4619573AOct 28, 1986
Article transport apparatus
TEGAL CORP32 citations88
US4888088ADec 19, 1989
Ignitor for a microwave sustained plasma
TEGAL CORP41 citations87
US4958658ASep 25, 1990
Mass flow stabilized
TEGAL CORP47 citations86
US4889588ADec 26, 1989
Plasma etch isotropy control
TEGAL CORP67 citations86
US4687543AAug 18, 1987
Selective plasma etching during formation of integrated circuitry
TEGAL CORP56 citations85
US7867905B2Jan 11, 2011
System and method for semiconductor processing
TEGAL CORP13 citations84
US6998097B1Feb 14, 2006
High pressure chemical vapor trapping system
TEGAL CORP13 citations84
Showing the top 50 of 95 patents by PatentIndex Score.