Assignee
TEL MFG AND ENGINEERING OF AMERICA INC
US·13 granted patents·13 pending applications·9 citations·filing 2015–2025
Top patents by PatentIndex Score
26 records- 0187US11694872B2Pattern enhancement using a gas cluster ion beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Granted Jul 4, 2023·1 cites·22 claims
- 0286US11020774B2Microelectronic treatment system having treatment spray with controllable beam sizeTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2019·Granted Jun 1, 2021·5 cites·26 claims
- 0377US11915906B2Wafer scanning apparatus and method for focused beam processingTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2023·Granted Feb 27, 2024·0 cites·20 claims
- 0474US11476129B2Translating and rotating chuck for processing microelectronic substrates in a process chamberTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2017·Granted Oct 18, 2022·2 cites·30 claims
- 0572US11309178B2Treatment systems with repositionable nozzle useful in the manufacture of microelectronic devicesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2019·Granted Apr 19, 2022·1 cites·23 claims
- 0672US2024290619A1Substrate scanning apparatus with pendulum and rotatable substrate holderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 0770US2026082879A1Directional sidewall deposition using directional beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2025·Application pending·0 cites
- 0870US2023352321A1Wet processing of microelectronic substrates with controlled mixing of fluids proximal to substrate surfacesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2023·Application pending·0 cites
- 0969US11707770B2Pressure control strategies to provide uniform treatment streams in the manufacture of microelectronic devicesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Granted Jul 25, 2023·0 cites·22 claims
- 1069US11587760B2Wafer scanning apparatus and method for focused beam processingTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Granted Feb 21, 2023·0 cites·15 claims
- 1168US11450506B2Pattern enhancement using a gas cluster ion beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Granted Sep 20, 2022·0 cites·22 claims
- 1267US11458512B2Systems and methods for rotating and translating a substrate in a process chamberTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Granted Oct 4, 2022·0 cites·6 claims
- 1364US2023369075A2Translating and rotating chuck for processing microelectronic substrates in a process chamberTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Application pending·0 cites
- 1464US2026066217A1Method for substrate processingTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 1563US2021050233A1Systems and methods for treating substrates with cryogenic fluid mixturesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Application pending·0 cites
- 1663US2022088647A1System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid spraysTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Application pending·0 cites
- 1762US12334348B2Substrate scanning apparatus with pendulum and rotatable substrate holderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Granted Jun 17, 2025·0 cites·20 claims
- 1861US2026082868A1Stitching defect reduction using gas cluster beamTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 1960US2025266285A1Multi-wafer handling systemTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 2060US2024353751A1Optical elements patterningTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2023·Application pending·0 cites
- 2159US2026052906A1Method for processing a substrateTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2024·Application pending·0 cites
- 2258US12593646B2Automated fault detection in microfabricationTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Granted Mar 31, 2026·0 cites·20 claims
- 2357US11715620B2Tuning gas cluster ion beam systemsTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Granted Aug 1, 2023·0 cites·20 claims
- 2455US11355376B2Systems and methods for treating substrates with cryogenic fluid mixturesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2015·Granted Jun 7, 2022·0 cites·19 claims
- 2553US2023420274A1Radiatively-Cooled Substrate HolderTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2022·Application pending·0 cites
- 2643US2020273715A1Method of smoothing and planarizing of altic surfacesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Application pending·0 cites
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