Assignee
TEL VARIAN LIMITED
JP·5 granted patents·633 citations·filing 1993–1995
Top patents by PatentIndex Score
5 records- 0193US5474410AMulti-chamber system provided with carrier unitsTEL VARIAN LIMITED·Filed 1994·Granted Dec 12, 1995·478 cites·10 claims
- 0284US5624536AProcessing apparatus with collimator exchange deviceTEL VARIAN LIMITED·Filed 1995·Granted Apr 29, 1997·50 cites·6 claims
- 0374US5584973AProcessing apparatus with an invertible collimator and a processing method thereforTEL VARIAN LIMITED·Filed 1995·Granted Dec 17, 1996·42 cites·12 claims
- 0470US5445675ASemiconductor processing apparatusTEL VARIAN LIMITED·Filed 1993·Granted Aug 29, 1995·52 cites·17 claims
- 0541US5448147ASelectable feedback control systemTEL VARIAN LIMITED·Filed 1993·Granted Sep 5, 1995·11 cites·11 claims
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