Assignee
TEL WIM TJIBBO
NL·2 granted patents·10 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0177US9177219B2Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productTEL WIM TJIBBO·Filed 2011·Granted Nov 3, 2015·9 cites·16 claims
- 0261US8937705B2Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting deviceTEL WIM TJIBBO·Filed 2009·Granted Jan 20, 2015·1 cites·26 claims
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