Assignee
TEL YAMANISHI KK
JP·18 granted patents·2,042 citations·filing 1991–1998
Top patents by PatentIndex Score
18 records- 0196US5325052AProbe apparatusTEL YAMANISHI KK·Filed 1992·Granted Jun 28, 1994·213 cites·9 claims
- 0292US5321352AProbe apparatus and method of alignment for the sameTEL YAMANISHI KK·Filed 1992·Granted Jun 14, 1994·170 cites·25 claims
- 0391US5410259AProbing device setting a probe card parallelTEL YAMANISHI KK·Filed 1993·Granted Apr 25, 1995·229 cites·16 claims
- 0490US5314603APlasma processing apparatus capable of detecting and regulating actual RF power at electrode within chamberTEL YAMANISHI KK·Filed 1992·Granted May 24, 1994·162 cites·21 claims
- 0590US5278494AWafer probing test machineTEL YAMANISHI KK·Filed 1992·Granted Jan 11, 1994·664 cites·5 claims
- 0689US5310453APlasma process method using an electrostatic chuckTEL YAMANISHI KK·Filed 1993·Granted May 10, 1994·166 cites·14 claims
- 0776US5412329AProbe cardTEL YAMANISHI KK·Filed 1994·Granted May 2, 1995·71 cites·12 claims
- 0872US6101970APlasma processing apparatusTEL YAMANISHI KK·Filed 1998·Granted Aug 15, 2000·41 cites·20 claims
- 0970US5220279AProbe apparatusTEL YAMANISHI KK·Filed 1992·Granted Jun 15, 1993·71 cites·9 claims
- 1069US5376212AReduced-pressure processing apparatusTEL YAMANISHI KK·Filed 1993·Granted Dec 27, 1994·69 cites·14 claims
- 1168US5399983AProbe apparatusTEL YAMANISHI KK·Filed 1994·Granted Mar 21, 1995·29 cites·11 claims
- 1268US5264918AMethod and device for detecting the center of a waferTEL YAMANISHI KK·Filed 1992·Granted Nov 23, 1993·55 cites·17 claims
- 1363US5958258APlasma processing method in semiconductor processing systemTEL YAMANISHI KK·Filed 1998·Granted Sep 28, 1999·28 cites·15 claims
- 1455US5342471APlasma processing apparatus including condensation preventing meansTEL YAMANISHI KK·Filed 1992·Granted Aug 30, 1994·32 cites·25 claims
- 1550US5227642AApparatus for optically reading and discriminating symbols or characters represented by indentations formed on the surface of a sampleTEL YAMANISHI KK·Filed 1991·Granted Jul 13, 1993·18 cites·11 claims
- 1644US5266895AProbe with contact portion including Au and Cu alloyTEL YAMANISHI KK·Filed 1991·Granted Nov 30, 1993·15 cites·5 claims
- 1739US6079357APlasma processing apparatusTEL YAMANISHI KK·Filed 1998·Granted Jun 27, 2000·4 cites·17 claims
- 1823US5323106ADevice for testing semiconductor devicesTEL YAMANISHI KK·Filed 1992·Granted Jun 21, 1994·5 cites·14 claims
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