Assignee
TELIC CORP
11 patents
Top patents by PatentIndex Score
US4132613AJan 2, 1979
Glow discharge method and apparatus
TELIC CORP49 citations95
US4031424AJun 21, 1977
Electrode type glow discharge apparatus
TELIC CORP66 citations95
US4126530ANov 21, 1978
Method and apparatus for sputter cleaning and bias sputtering
TELIC CORP43 citations92
US4041353AAug 9, 1977
Glow discharge method and apparatus
TELIC CORP38 citations92
US4132612AJan 2, 1979
Glow discharge method and apparatus
TELIC CORP25 citations81
US4116793ASep 26, 1978
Glow discharge method and apparatus
TELIC CORP25 citations81
US4116794ASep 26, 1978
Glow discharge method and apparatus
TELIC CORP22 citations81
US4111782ASep 5, 1978
Sputtering apparatus
TELIC CORP16 citations81
US4030996AJun 21, 1977
Electrode type glow discharge method and apparatus
TELIC CORP29 citations81
US3995187ANov 30, 1976
Electrode type glow discharge apparatus
TELIC CORP29 citations81
US4243505AJan 6, 1981
Magnetic field generator for use in sputtering apparatus
TELIC CORP10 citations72