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TENCOR INSTRUMENTS
US49 patents
Top patents by PatentIndex Score
US5633747AMay 27, 1997
Variable spot-size scanning apparatus
TENCOR INSTRUMENTS181 citations99
US5416594AMay 16, 1995
Surface scanner with thin film gauge
TENCOR INSTRUMENTS210 citations99
US5264912ANov 23, 1993
Speckle reduction track filter apparatus for optical inspection of patterned substrates
TENCOR INSTRUMENTS223 citations99
US5189481AFeb 23, 1993
Particle detector for rough surfaces
TENCOR INSTRUMENTS276 citations99
US4378159AMar 29, 1983
Scanning contaminant and defect detector
TENCOR INSTRUMENTS229 citations98
US5604585AFeb 18, 1997
Particle detection system employing a subsystem for collecting scattered light from the particles
TENCOR INSTRUMENTS106 citations97
US5076692ADec 31, 1991
Particle detection on a patterned or bare wafer surface
TENCOR INSTRUMENTS157 citations97
US5705741AJan 6, 1998
Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation
TENCOR INSTRUMENTS71 citations96
US5608526AMar 4, 1997
Focused beam spectroscopic ellipsometry method and system
TENCOR INSTRUMENTS745 citations96
US5355212AOct 11, 1994
Process for inspecting patterned wafers
TENCOR INSTRUMENTS163 citations96
US4844617AJul 4, 1989
Confocal measuring microscope with automatic focusing
TENCOR INSTRUMENTS530 citations96
US4601576AJul 22, 1986
Light collector for optical contaminant and flaw detector
TENCOR INSTRUMENTS134 citations96
US4302721ANov 24, 1981
Non-contacting resistivity instrument with structurally related conductance and distance measuring transducers
TENCOR INSTRUMENTS56 citations96
US5552704ASep 3, 1996
Eddy current test method and apparatus for measuring conductance by determining intersection of lift-off and selected curves
TENCOR INSTRUMENTS56 citations95
US5276498AJan 4, 1994
Adaptive spatial filter for surface inspection
TENCOR INSTRUMENTS70 citations95
US5241366AAug 31, 1993
Thin film thickness monitor
TENCOR INSTRUMENTS79 citations95
US5168386ADec 1, 1992
Flat field telecentric scanner
TENCOR INSTRUMENTS74 citations95
US5023424AJun 11, 1991
Shock wave particle removal method and apparatus
TENCOR INSTRUMENTS113 citations95
US4898471AFeb 6, 1990
Particle detection on patterned wafers and the like
TENCOR INSTRUMENTS295 citations95
US4766324AAug 23, 1988
Particle detection method including comparison between sequential scans
TENCOR INSTRUMENTS138 citations95
US4752898AJun 21, 1988
Edge finding in wafers
TENCOR INSTRUMENTS68 citations95
US4641967AFeb 10, 1987
Particle position correlator and correlation method for a surface scanner
TENCOR INSTRUMENTS115 citations95
US4597665AJul 1, 1986
Dual collector optical flaw detector
TENCOR INSTRUMENTS70 citations95
US5581350ADec 3, 1996
Method and system for calibrating an ellipsometer
TENCOR INSTRUMENTS162 citations94
US4899055AFeb 6, 1990
Thin film thickness measuring method
TENCOR INSTRUMENTS176 citations94
US5530550AJun 25, 1996
Optical wafer positioning system
TENCOR INSTRUMENTS79 citations93
US5309755AMay 10, 1994
Profilometer stylus assembly insensitive to vibration
TENCOR INSTRUMENTS39 citations93
US5243465ASep 7, 1993
Area-division beamsplitter with broad spectral bandwidth
TENCOR INSTRUMENTS42 citations93
US5565979AOct 15, 1996
Surface scanning apparatus and method using crossed-cylinder optical elements
TENCOR INSTRUMENTS56 citations92
US5083035AJan 21, 1992
Position location in surface scanning using interval timing between scan marks on test wafers
TENCOR INSTRUMENTS25 citations92
US4967095AOct 30, 1990
Method and apparatus for detecting and sizing particles on surfaces
TENCOR INSTRUMENTS48 citations92
US4861125AAug 29, 1989
Suspension assembly for a scanning mirror
TENCOR INSTRUMENTS26 citations92
US4597708AJul 1, 1986
Wafer handling apparatus
TENCOR INSTRUMENTS36 citations92
US5576831ANov 19, 1996
Wafer alignment sensor
TENCOR INSTRUMENTS79 citations91
US4988877AJan 29, 1991
Via hole checker
TENCOR INSTRUMENTS55 citations91
US4609037ASep 2, 1986
Apparatus for heating and cooling articles
TENCOR INSTRUMENTS65 citations91
US4877997AOct 31, 1989
High brightness and viewed gas discharge lamp
TENCOR INSTRUMENTS21 citations82
US4391044AJul 5, 1983
Metrology instrument for measuring vertical profiles of integrated circuits and the like
TENCOR INSTRUMENTS23 citations82
US4103542AAug 1, 1978
Metrology instrument for measuring vertical profiles of integrated circuits
TENCOR INSTRUMENTS29 citations82
US4998019AMar 5, 1991
Photoemission contaminant detector
TENCOR INSTRUMENTS21 citations81
US4512659AApr 23, 1985
Apparatus for calibrating a surface scanner
TENCOR INSTRUMENTS25 citations81
US4376482AMar 15, 1983
Wafer orientation system
TENCOR INSTRUMENTS22 citations81
US5026437AJun 25, 1991
Cantilevered microtip manufacturing by ion implantation and etching
TENCOR INSTRUMENTS14 citations74
US4965484AOct 23, 1990
Vapor discharge lamp with gradient temperature control
TENCOR INSTRUMENTS18 citations74
US4433835AFeb 28, 1984
Wafer chuck with wafer cleaning feature
TENCOR INSTRUMENTS15 citations74
US4280354AJul 28, 1981
Acoustic method and apparatus for measuring surfaces of wafers and similar articles
TENCOR INSTRUMENTS18 citations74
US4285053AAug 18, 1981
Acoustic method and apparatus for measuring micron and submicron distances
TENCOR INSTRUMENTS13 citations73
US4175441ANov 27, 1979
Gauge for measuring distance to planar surfaces and thicknesses of planar members
TENCOR INSTRUMENTS18 citations73
US4282483AAug 4, 1981
Probe for determining p or n-type conductivity of semiconductor material
TENCOR INSTRUMENTS5 citations62