Assignee
TERASAWA TSUNEO
JP·3 granted patents·15 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0189US8488866B2Method of inspecting mask pattern and mask pattern inspection apparatusTERASAWA TSUNEO·Filed 2010·Granted Jul 16, 2013·12 cites·16 claims
- 0270US8435702B2Manufacturing method of semiconductor device and manufacturing method of maskTERASAWA TSUNEO·Filed 2009·Granted May 7, 2013·3 cites·14 claims
- 0356US9063098B2Method of inspecting mask, mask inspection device, and method of manufacturing maskTERASAWA TSUNEO·Filed 2012·Granted Jun 23, 2015·0 cites·4 claims
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