Assignee
TERASEMICON CO LTD
KR·2 granted patents·537 citations·filing 2004–2006
Top patents by PatentIndex Score
2 records- 0195US7207763B2Semiconductor manufacturing system and wafer holder for semiconductor manufacturing systemTERASEMICON CO LTD·Filed 2004·Granted Apr 24, 2007·533 cites·12 claims
- 0272US7525068B2Heating system of batch type reaction chamber and method thereofTERASEMICON CO LTD·Filed 2006·Granted Apr 28, 2009·4 cites·10 claims
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