Assignee
TEVET PROCESS CONTROL TECHNOLO
IL·4 granted patents·340 citations·filing 1999–2002
Top patents by PatentIndex Score
4 records- 0193US6678055B2Method and apparatus for measuring stress in semiconductor wafersTEVET PROCESS CONTROL TECHNOLO·Filed 2001·Granted Jan 13, 2004·139 cites·51 claims
- 0291US6885467B2Method and apparatus for thickness decomposition of complicated layer structuresTEVET PROCESS CONTROL TECHNOLO·Filed 2002·Granted Apr 26, 2005·75 cites·26 claims
- 0388US6762838B2Method and apparatus for production line screeningTEVET PROCESS CONTROL TECHNOLO·Filed 2001·Granted Jul 13, 2004·57 cites·36 claims
- 0485US6801321B1Method and apparatus for measuring lateral variations in thickness or refractive index of a transparent film on a substrateTEVET PROCESS CONTROL TECHNOLO·Filed 1999·Granted Oct 5, 2004·69 cites·34 claims
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