Assignee
THERMCO PRODUCTS CORP
5 granted patents·276 citations·filing 1977–1981
Top patents by PatentIndex Score
5 records- 0193US4369031AGas control system for chemical vapor deposition systemTHERMCO PRODUCTS CORP·Filed 1981·Granted Jan 18, 1983·190 cites·14 claims
- 0267US4108420AAdjustable gas flow control valveTHERMCO PRODUCTS CORP·Filed 1977·Granted Aug 22, 1978·31 cites·3 claims
- 0357US4253417AClosure for thermal reactorTHERMCO PRODUCTS CORP·Filed 1980·Granted Mar 3, 1981·17 cites·14 claims
- 0456US4228004AMethod and apparatus for removal of by-products of chemical vapor deposition from oil for vacuum pumpTHERMCO PRODUCTS CORP·Filed 1979·Granted Oct 14, 1980·14 cites·32 claims
- 0554US4376796AProcessing silicon wafers employing processing gas atmospheres of similar molecular weightTHERMCO PRODUCTS CORP·Filed 1981·Granted Mar 15, 1983·24 cites·25 claims
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