Assignee
TIAN CAIZHONG
JP·4 granted patents·2 pending applications·11 citations·filing 2005–2012
Top patents by PatentIndex Score
6 records- 0175US8967080B2Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing methodTIAN CAIZHONG·Filed 2009·Granted Mar 3, 2015·10 cites·8 claims
- 0269US8480848B2Plasma processing apparatusTIAN CAIZHONG·Filed 2006·Granted Jul 9, 2013·1 cites·8 claims
- 0355US8273210B2Plasma processing apparatus and method for adjusting plasma density distributionTIAN CAIZHONG·Filed 2008·Granted Sep 25, 2012·0 cites·17 claims
- 0440US2008190560A1Microwave Plasma Processing ApparatusTIAN CAIZHONG·Filed 2006·Application pending·0 cites
- 0539US8387560B2Plasma processing unitTIAN CAIZHONG·Filed 2005·Granted Mar 5, 2013·0 cites·13 claims
- 0635US2014166205A1Process monitoring device for use in substrate process apparatus, process monitoring method and substrate processing apparatusTIAN CAIZHONG·Filed 2012·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →