Assignee

TILLACK BERND

DE·1 granted patent·1 citations·filing 2008–2008

Technology mixC23C1 H10P1

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1 record

0155US8546249B2Selective growth of polycrystalline silicon-containing semiconductor material on a silicon-containing semiconductor surfaceTILLACK BERND·Filed 2008·Granted Oct 1, 2013·1 cites·15 claims

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