Assignee
TIRAPU-AZPIROZ JAIONE
BR·4 granted patents·50 citations·filing 2008–2012
Technology mixG03F4
Top patents by PatentIndex Score
4 records- 0194US8458626B1Method for calibrating an SRAF printing modelTIRAPU-AZPIROZ JAIONE·Filed 2012·Granted Jun 4, 2013·20 cites·20 claims
- 0292US8078995B2Efficient isotropic modeling approach to incorporate electromagnetic effects into lithographic process simulationsTIRAPU AZPIROZ JAIONE·Filed 2009·Granted Dec 13, 2011·19 cites·42 claims
- 0391US8271910B2EMF correction model calibration using asymmetry factor data obtained from aerial images or a patterned layerTIRAPU-AZPIROZ JAIONE·Filed 2010·Granted Sep 18, 2012·9 cites·13 claims
- 0468US8059885B2Calculating image intensity of mask by decomposing Manhattan polygon based on parallel edgeTIRAPU-AZPIROZ JAIONE·Filed 2008·Granted Nov 15, 2011·2 cites·25 claims
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