Assignee
TOKUDA SEISAKUSHO
8 granted patents·512 citations·filing 1976–1993
Top patents by PatentIndex Score
8 records- 0196US4221652ASputtering deviceTOKUDA SEISAKUSHO·Filed 1976·Granted Sep 9, 1980·76 cites·16 claims
- 0291US4645218AElectrostatic chuckTOKUDA SEISAKUSHO·Filed 1985·Granted Feb 24, 1987·147 cites·16 claims
- 0388US4600492AMagnet driving method and device for sameTOKUDA SEISAKUSHO·Filed 1985·Granted Jul 15, 1986·58 cites·9 claims
- 0484US4771730AVacuum processing apparatus wherein temperature can be controlledTOKUDA SEISAKUSHO·Filed 1987·Granted Sep 20, 1988·145 cites·7 claims
- 0577US4351714ASputter-etching deviceTOKUDA SEISAKUSHO·Filed 1981·Granted Sep 28, 1982·19 cites·10 claims
- 0666US5201994ADry etching methodTOKUDA SEISAKUSHO·Filed 1989·Granted Apr 13, 1993·33 cites·5 claims
- 0759US5336385ASputtering apparatusTOKUDA SEISAKUSHO·Filed 1993·Granted Aug 9, 1994·16 cites·12 claims
- 0850US4341593APlasma etching method for aluminum-based filmsTOKUDA SEISAKUSHO·Filed 1980·Granted Jul 27, 1982·18 cites·8 claims
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