Assignee
TOKYO ELECTRON LTD OF TBS BROA
JP·0 granted patents·2 pending applications·0 citations·filing 2004–2004
Top patents by PatentIndex Score
2 records- 0138US2005199872A1Silicon-germanium thin layer semiconductor structure with variable silicon-germanium composition and method of fabricationTOKYO ELECTRON LTD OF TBS BROA·Filed 2004·Application pending·0 cites
- 0233US2005211264A1Method and processing system for plasma-enhanced cleaning of system componentsTOKYO ELECTRON LTD OF TBS BROA·Filed 2004·Application pending·0 cites
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