Assignee
TOKYO ELECTRON TOHOKU KABUSHIK
JP·4 granted patents·184 citations·filing 1993–1996
Top patents by PatentIndex Score
4 records- 0185US5388944AVertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatusTOKYO ELECTRON TOHOKU KABUSHIK·Filed 1993·Granted Feb 14, 1995·116 cites·17 claims
- 0269US5662469AHeat treatment methodTOKYO ELECTRON TOHOKU KABUSHIK·Filed 1995·Granted Sep 2, 1997·37 cites·10 claims
- 0362US5671903AHeat treatment apparatus and valve device for use in the sameTOKYO ELECTRON TOHOKU KABUSHIK·Filed 1994·Granted Sep 30, 1997·23 cites·3 claims
- 0439US5884917AThermal processing apparatusTOKYO ELECTRON TOHOKU KABUSHIK·Filed 1996·Granted Mar 23, 1999·8 cites·6 claims
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