Assignee

TOSHIBA CERAMICS COMPANY LIMIT

JP·1 granted patent·20 citations·filing 1988–1988

Technology mixC04B1 H10P1 Y10S1 Y10T1

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0147US4904515AHeat-treatment member for semiconductor elementsTOSHIBA CERAMICS COMPANY LIMIT·Filed 1988·Granted Feb 27, 1990·20 cites·7 claims

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