Assignee

TOSOH SMG CORP

JP·1 granted patent·7 citations·filing 2003–2003

Technology mixC03B1 C03C1 Y02P1

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1 record

0168US7064094B2Highly durable silica glass, process and apparatus for producing same, and member and apparatus provided with sameTOSOH SMG CORP·Filed 2003·Granted Jun 20, 2006·7 cites·12 claims

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