Assignee
TOZAWA SHIGEKI
JP·2 granted patents·3 pending applications·5 citations·filing 2006–2012
Top patents by PatentIndex Score
5 records- 0179US8991333B2Substrate processing method and systemTOZAWA SHIGEKI·Filed 2011·Granted Mar 31, 2015·5 cites·19 claims
- 0251US2009191340A1Substrate processing method and systemTOZAWA SHIGEKI·Filed 2008·Application pending·0 cites
- 0347US2010163179A1Substrate Processing ApparatusTOZAWA SHIGEKI·Filed 2006·Application pending·0 cites
- 0445US2012178263A1Substrate processing apparatusTOZAWA SHIGEKI·Filed 2012·Application pending·0 cites
- 0542US9105586B2Etching of silicon oxide filmTOZAWA SHIGEKI·Filed 2008·Granted Aug 11, 2015·0 cites·6 claims
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