Assignee
TRIKON HOLDINGS LTD
GB·22 granted patents·362 citations·filing 1999–2003
Top patents by PatentIndex Score
22 records- 0190US6640840B1Delivery of liquid precursors to semiconductor processing reactorsTRIKON HOLDINGS LTD·Filed 2000·Granted Nov 4, 2003·46 cites·4 claims
- 0289US6653247B2Dielectric layer for a semiconductor device and method of producing the sameTRIKON HOLDINGS LTD·Filed 2001·Granted Nov 25, 2003·41 cites·27 claims
- 0387US6495963B1Inductive coil assembly having multiple coil segments for plasma processing apparatusTRIKON HOLDINGS LTD·Filed 1999·Granted Dec 17, 2002·54 cites·20 claims
- 0484US6846757B2Dielectric layer for a semiconductor device and method of producing the sameTRIKON HOLDINGS LTD·Filed 2003·Granted Jan 25, 2005·26 cites·4 claims
- 0583US6876154B2Plasma processing apparatusTRIKON HOLDINGS LTD·Filed 2003·Granted Apr 5, 2005·40 cites·41 claims
- 0676US6402907B1Method of forming a barrier layerTRIKON HOLDINGS LTD·Filed 2000·Granted Jun 11, 2002·25 cites·10 claims
- 0775US6627535B2Methods and apparatus for forming a film on a substrateTRIKON HOLDINGS LTD·Filed 2001·Granted Sep 30, 2003·30 cites·9 claims
- 0874US6533868B1Deposition apparatusTRIKON HOLDINGS LTD·Filed 2000·Granted Mar 18, 2003·21 cites·8 claims
- 0968US6468386B1Gas delivery systemTRIKON HOLDINGS LTD·Filed 2000·Granted Oct 22, 2002·15 cites·12 claims
- 1067US6929831B2Methods of forming nitride filmsTRIKON HOLDINGS LTD·Filed 2002·Granted Aug 16, 2005·11 cites·28 claims
- 1167US6660140B2Sputtering apparatusTRIKON HOLDINGS LTD·Filed 2000·Granted Dec 9, 2003·8 cites·2 claims
- 1259US6876534B2Method of clamping a wafer during a process that creates asymmetric stress in the waferTRIKON HOLDINGS LTD·Filed 2001·Granted Apr 5, 2005·8 cites·5 claims
- 1357US6963137B2Low dielectric constant layersTRIKON HOLDINGS LTD·Filed 2002·Granted Nov 8, 2005·11 cites·19 claims
- 1455US6592770B1Method of treating an isulating layerTRIKON HOLDINGS LTD·Filed 2000·Granted Jul 15, 2003·4 cites·17 claims
- 1554US6531942B2Method of cooling an induction coilTRIKON HOLDINGS LTD·Filed 2001·Granted Mar 11, 2003·3 cites·19 claims
- 1651US6933099B2Method of forming a patterned metal layerTRIKON HOLDINGS LTD·Filed 2002·Granted Aug 23, 2005·3 cites·23 claims
- 1750US7129161B2Depositing a tantalum filmTRIKON HOLDINGS LTD·Filed 2002·Granted Oct 31, 2006·6 cites·12 claims
- 1850US6824699B2Method of treating an insulting layerTRIKON HOLDINGS LTD·Filed 2003·Granted Nov 30, 2004·2 cites·9 claims
- 1942US6949170B2Deposition methods and apparatusTRIKON HOLDINGS LTD·Filed 2003·Granted Sep 27, 2005·0 cites·19 claims
- 2039US6936481B2Method of depositing dielectricTRIKON HOLDINGS LTD·Filed 2003·Granted Aug 30, 2005·1 cites·23 claims
- 2137US6179974B1Apparatus and methods for sputteringTRIKON HOLDINGS LTD·Filed 1999·Granted Jan 30, 2001·7 cites·19 claims
- 2226US6649527B2Method of etching a substrateTRIKON HOLDINGS LTD·Filed 2002·Granted Nov 18, 2003·0 cites·16 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →