Assignee

TRIPATHY SUDHIRANJAN

SG·1 granted patent·5 citations·filing 2007–2007

Technology mixB81B1 B81C1

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1 record

0162US8278725B2Micromechanical structure and a method of fabricating a micromechanical structureTRIPATHY SUDHIRANJAN·Filed 2007·Granted Oct 2, 2012·5 cites·15 claims

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