Assignee
TRUMPF HUETTINGER SP Z O O
PL·18 granted patents·15 pending applications·174 citations·filing 2013–2025
Top patents by PatentIndex Score
33 records- 0194US9840770B2Generating a highly ionized plasma in a plasma chamberTRUMPF HUETTINGER SP Z O O·Filed 2013·Granted Dec 12, 2017·38 cites·21 claims
- 0292US10971342B2Controlling multiple plasma processesTRUMPF HUETTINGER SP Z O O·Filed 2019·Granted Apr 6, 2021·38 cites·18 claims
- 0391US10431437B2Detecting an arc occuring during supplying power to a plasma processTRUMPF HUETTINGER SP Z O O·Filed 2017·Granted Oct 1, 2019·41 cites·20 claims
- 0491US10297431B2Treating arcs in a plasma processTRUMPF HUETTINGER SP Z O O·Filed 2017·Granted May 21, 2019·42 cites·20 claims
- 0589US11798786B2Power converter, power supply system and HF plasma systemTRUMPF HUETTINGER SP Z O O·Filed 2021·Granted Oct 24, 2023·4 cites·44 claims
- 0683US10290477B2Monitoring a discharge in a plasma processTRUMPF HUETTINGER SP Z O O·Filed 2016·Granted May 14, 2019·5 cites·19 claims
- 0781US9818579B2Reducing stored electrical energy in a lead inductanceTRUMPF HUETTINGER SP Z O O·Filed 2014·Granted Nov 14, 2017·2 cites·26 claims
- 0877US9368328B2Apparatus for generating and maintaining plasma for plasma processingTRUMPF HUETTINGER SP Z O O·Filed 2013·Granted Jun 14, 2016·4 cites·19 claims
- 0974US2026075782A1Electronic device and method of cooling thereofTRUMPF HUETTINGER SP Z O O·Filed 2025·Application pending·0 cites
- 1071US2026075780A1Electronic device and method of cooling thereofTRUMPF HUETTINGER SP Z O O·Filed 2025·Application pending·0 cites
- 1171US2026075781A1Electronic device and method of cooling thereofTRUMPF HUETTINGER SP Z O O·Filed 2025·Application pending·0 cites
- 1264US2026022450A1Method of operating a plasma process system and a plasma process systemTRUMPF HUETTINGER SP Z O O·Filed 2025·Application pending·0 cites
- 1359US12322955B2HV switch unit with snubber arrangementsTRUMPF HUETTINGER SP Z O O·Filed 2023·Granted Jun 3, 2025·0 cites·13 claims
- 1458US12148601B2Method of plasma processing a substrate in a plasma chamber and plasma processing systemTRUMPF HUETTINGER SP Z O O·Filed 2022·Granted Nov 19, 2024·0 cites·21 claims
- 1558US2024429021A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 1658US2024421603A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 1758US2025006463A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 1858US2024429025A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 1958US2024420922A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 2058US2024429024A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 2157US12322570B2Pulsing assembly and power supply arrangementTRUMPF HUETTINGER SP Z O O·Filed 2023·Granted Jun 3, 2025·0 cites·14 claims
- 2257US2025210306A1Energy refeeding module, switching circuit and embodiment, plasma processing system, and a method of producing rectangular voltage output pulses for a plasma processing loadTRUMPF HUETTINGER SP Z O O·Filed 2025·Application pending·0 cites
- 2356US11955947B2Balun and amplifier including balunTRUMPF HUETTINGER SP Z O O·Filed 2021·Granted Apr 9, 2024·0 cites·26 claims
- 2456US2024421606A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 2556US2024421604A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 2656US2025007296A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 2754US11674981B2Arc detector for detecting arcs, plasma system and method of detecting arcsTRUMPF HUETTINGER SP Z O O·Filed 2021·Granted Jun 13, 2023·0 cites·22 claims
- 2853US2024421605A1High power generator and method of supplying high power pulsesTRUMPF HUETTINGER SP Z O O·Filed 2024·Application pending·0 cites
- 2951US11929233B2Method of adjusting the output power of a power supply supplying electrical power to a plasma, plasma apparatus and power supplyTRUMPF HUETTINGER SP Z O O·Filed 2021·Granted Mar 12, 2024·0 cites·15 claims
- 3048US12322954B2HV switch unit, pulsing assembly and method of avoiding voltage imbalances in an HV switchTRUMPF HUETTINGER SP Z O O·Filed 2023·Granted Jun 3, 2025·0 cites·14 claims
- 3142US11430642B2Controlling multiple plasma processesTRUMPF HUETTINGER SP Z O O·Filed 2019·Granted Aug 30, 2022·0 cites·17 claims
- 3239US11538670B2Controlling multiple plasma processesTRUMPF HUETTINGER SP Z O O·Filed 2019·Granted Dec 27, 2022·0 cites·20 claims
- 3332US10410835B2Plasma impedance matching for supplying RF power to a plasma loadTRUMPF HUETTINGER SP Z O O·Filed 2017·Granted Sep 10, 2019·0 cites·25 claims
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