Assignee
TRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH
DE·24 granted patents·11 pending applications·17 citations·filing 2013–2025
Top patents by PatentIndex Score
35 records- 0189US10186827B2Amplifying pulsed laser radiation for EUV radiation productionTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2017·Granted Jan 22, 2019·7 cites·20 claims
- 0282US9575324B2Beam guiding apparatusTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2016·Granted Feb 21, 2017·4 cites·20 claims
- 0369US9596743B2Beam guiding apparatusTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2016·Granted Mar 14, 2017·2 cites·19 claims
- 0468US11764538B2Method for adjusting a laser beam, apparatus for providing an adjusted laser beam and optical arrangementTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2021·Granted Sep 19, 2023·0 cites·18 claims
- 0568US10327318B2Adjusting a beam diameter and an aperture angle of a laser beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2017·Granted Jun 18, 2019·2 cites·20 claims
- 0666US9642235B2EUV radiation generating device including a beam influencing optical unitTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2015·Granted May 2, 2017·1 cites·13 claims
- 0765US10644473B2Exteme ultraviolet radiation producing systems with driver laser systems having optical isolatorsTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2018·Granted May 5, 2020·1 cites·24 claims
- 0863US11322902B2Arrangement for monitoring an optical element, laser source and euv radiation generation apparatusTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2021·Granted May 3, 2022·0 cites·18 claims
- 0960US2024198452A1Method for changing the polarization of a laserTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 1057US2024120700A1Co2 beam source comprising a catalystTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2023·Application pending·0 cites
- 1157US2025158342A1Measuring device for adjusting a laser beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2025·Application pending·0 cites
- 1256US2023113801A1Adjustable optical arrangementTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2022·Application pending·0 cites
- 1355US12171054B2EUV light source with a beam positioning deviceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Granted Dec 17, 2024·0 cites·15 claims
- 1455US11675202B2Reflective optical element, beam guiding device and EUV-beam generating deviceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2020·Granted Jun 13, 2023·0 cites·10 claims
- 1555US2025105577A1Apparatus for correcting astigmatism of a laser beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 1655US2025180400A1Arrangement for laser protectionTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2025·Application pending·0 cites
- 1753US2024255767A1Method and device for generating laser pulsesTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 1852US2024168306A1Focusing device having an image plane extending parallel or congruent to a target planeTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 1951US10264660B2Beam trap, beam guide device, EUV radiation generating apparatus, and method for absorbing a beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2017·Granted Apr 16, 2019·0 cites·18 claims
- 2051US2025093197A1Vibration-monitored laser optical unitTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 2151US2025113427A1Euv radiation generation following laser beam rotationTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2024·Application pending·0 cites
- 2250US11835699B2Focusing device and EUV radiation generating device having sameTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2020·Granted Dec 5, 2023·0 cites·11 claims
- 2349US2025203746A1Beam diaphragm, euv light source, and method for operating an euv light sourceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2025·Application pending·0 cites
- 2448US9323026B2Optical arrangement, optical module, and method for correctly positioning an optical module in a housingTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2013·Granted Apr 26, 2016·0 cites·15 claims
- 2548US9306367B2Device for amplifying a laser beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2013·Granted Apr 5, 2016·0 cites·15 claims
- 2645US11243114B2Method for determining at least one beam propagation parameter of a laser beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2018·Granted Feb 8, 2022·0 cites·13 claims
- 2744US11988909B2Faraday rotators, optical isolators, driver laser arrangements and EUV radiation generation apparatusTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2020·Granted May 21, 2024·0 cites·14 claims
- 2844US10044167B2Monitoring laser beamsTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2016·Granted Aug 7, 2018·0 cites·28 claims
- 2943US10638589B2Amplifying laser pulses having different wavelengths for EUV radiation generationTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2018·Granted Apr 28, 2020·0 cites·21 claims
- 3041US11968767B2EUV light source with a separation deviceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2023·Granted Apr 23, 2024·0 cites·13 claims
- 3139US10739572B2Elongating a travel path of a light beam by an optical delay deviceTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2017·Granted Aug 11, 2020·0 cites·21 claims
- 3236US10884255B2Linear polarization of a laser beamTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2018·Granted Jan 5, 2021·0 cites·3 claims
- 3335US11304286B2PolarizerTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2020·Granted Apr 12, 2022·0 cites·15 claims
- 3429US12282258B2Beam guide and positioning device for positioning a scraper mirror, provided for coupling out laser radiationTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2021·Granted Apr 22, 2025·0 cites·15 claims
- 3528US12153276B2Optical assembly, in particular for polarization of a laser beam, and EUV radiation generating device therewithTRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH·Filed 2018·Granted Nov 26, 2024·0 cites·15 claims
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