Assignee
TSAI PO-FENG
TW·8 granted patents·56 citations·filing 2009–2011
Top patents by PatentIndex Score
8 records- 0193US8437870B2System and method for implementing a virtual metrology advanced process control platformTSAI PO-FENG·Filed 2009·Granted May 7, 2013·31 cites·17 claims
- 0284US8606387B2Adaptive and automatic determination of system parametersTSAI PO-FENG·Filed 2011·Granted Dec 10, 2013·6 cites·20 claims
- 0384US8224475B2Method and apparatus for advanced process controlTSAI PO-FENG·Filed 2009·Granted Jul 17, 2012·10 cites·20 claims
- 0482US8396583B2Method and system for implementing virtual metrology in semiconductor fabricationTSAI PO-FENG·Filed 2010·Granted Mar 12, 2013·6 cites·20 claims
- 0569US9349660B2Integrated circuit manufacturing tool condition monitoring system and methodTSAI PO-FENG·Filed 2011·Granted May 24, 2016·2 cites·20 claims
- 0662US8549012B2Processing exception handlingTSAI PO-FENG·Filed 2010·Granted Oct 1, 2013·1 cites·18 claims
- 0742US10047439B2Method and system for tool condition monitoring based on a simulated inline measurementTSAI PO FENG·Filed 2011·Granted Aug 14, 2018·0 cites·20 claims
- 0839US9026239B2APC model extension using existing APC modelsTSAI PO-FENG·Filed 2010·Granted May 5, 2015·0 cites·18 claims
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