Assignee
TSAI PO-FENG
TW7 patents
Top patents by PatentIndex Score
US8437870B2May 7, 2013
System and method for implementing a virtual metrology advanced process control platform
TSAI PO-FENG31 citations90
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Adaptive and automatic determination of system parameters
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US8224475B2Jul 17, 2012
Method and apparatus for advanced process control
TSAI PO-FENG10 citations82
US8396583B2Mar 12, 2013
Method and system for implementing virtual metrology in semiconductor fabrication
TSAI PO-FENG6 citations72
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Integrated circuit manufacturing tool condition monitoring system and method
TSAI PO-FENG2 citations61
US8549012B2Oct 1, 2013
Processing exception handling
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US9026239B2May 5, 2015
APC model extension using existing APC models
TSAI PO-FENG0 citations41