Assignee
TSUCHIHASHI TORU
JP·4 granted patents·1 pending application·6 citations·filing 2010–2013
Top patents by PatentIndex Score
5 records- 0180US8637222B2Negative resist pattern forming method, developer and negative chemical-amplification resist composition used therefor, and resist patternTSUCHIHASHI TORU·Filed 2010·Granted Jan 28, 2014·4 cites·16 claims
- 0273US8889339B2Resist pattern forming method, resist pattern, crosslinkable negative chemical amplification resist composition for organic solvent development, resist film and resist-coated mask blanksTSUCHIHASHI TORU·Filed 2013·Granted Nov 18, 2014·2 cites·12 claims
- 0342US8968988B2Resist pattern forming method, resist pattern, crosslinkable negative resist composition, nanoimprint mold and photomaskTSUCHIHASHI TORU·Filed 2012·Granted Mar 3, 2015·0 cites·13 claims
- 0440US8906600B2Resist pattern forming method, resist pattern, positive resist composition, nanoimprint mold and photomaskTSUCHIHASHI TORU·Filed 2012·Granted Dec 9, 2014·0 cites·15 claims
- 0535US2012094235A1Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the compositionTSUCHIHASHI TORU·Filed 2010·Application pending·0 cites
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